Semiconductor
UV technology in the semiconductor industry – purity, precision, and process reliability
In semiconductor manufacturing, the highest standards of cleanliness, precision, and control apply. Even the smallest contamination can impair the function of complex microstructures. UV technology plays a central role here – particularly in surface treatment with excimer radiation and the disinfection of process water.
Modern UV systems perfectly combine purity, efficiency, and sustainability – a key factor for reliability and quality in high-tech semiconductor production.
Excimer UV technology ensures precise, contact-free surface cleaning and activation for wafers and substrates, improving adhesion and process stability. UV-based water disinfection provides chemical-free microbiological control, reliably eliminating bacteria, viruses, and biofilms in semiconductor production.
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