TOC Reactors UV Water Treatment for Ultrapure and TOC-Critical Water

High-performance UV systems for water disinfection, organic contaminant breakdown and TOC reduction, engineered for semiconductor, pharma and food-grade water.

• TOC levels below 1 ppb achievable
• No chemical oxidants required
• Individually engineered UPW systems

Semiconductor, pharmaceutical and food-grade water applications often need more than disinfection. Organic contaminants and Total Organic Carbon levels have to stay within strict limits that standard treatment can’t reach.

Hoenle’s UV photooxidation systems use targeted UV wavelengths, including 185nm, to generate hydroxyl radicals that break down organic impurities into carbon dioxide and water. Combined with reverse osmosis, ion exchange or EDI, these systems consistently achieve TOC levels below 1 ppb, supporting process stability and higher yields in ultrapure water applications. Complete UPW systems are individually engineered for each customer, including installation and commissioning.

Key Benefits:

• Rapid and effective disinfection of microbes

• No chemical residues or disinfection by-products (DBPs)

• Low operating costs and easy maintenance

• Scalable for a wide range of flow rates and applications

Core competencies:

• Low-pressure UV lamps up to 600W

• Single- and dual-lamp electronic ballasts
• Ozone-generating and ozone-blocking UV lamps
• Precision sensors for monitoring

UPW Systems in Semiconductor Industry

In the semiconductor industry, ultrapure water (UPW) with extremely low Total Organic Carbon (TOC) levels is essential for preventing defects during wafer cleaning, photolithography, and rinsing processes. Hoenle provides advanced UV components and systems designed to ensure the highest water purity and reliable process performance.

Our UV solutions play a critical role in TOC reduction and water disinfection. At wavelengths around 185 nm, UVC generates hydroxyl radicals that effectively oxidize organic impurities, converting them into CO₂ and H₂O. When combined with additional purification technologies—such as reverse osmosis, ion exchange, or electrodeionization (EDI)—our systems consistently achieve TOC levels below 1 ppb, supporting process stability, higher yields, and reduced product rejection.

Need standard water disinfection without TOC reduction? Take a look at WDS-Series.

Not sure which size fits your water system?
With a portfolio this broad, a short conversation gets you to the right solution faster than browsing specs alone. Our team will help you find the right fit for your specific application.